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Mgbanaka mgbanaka CVD SiC
Ihe mgbanaka mgbanaka Semixlab CVD SiC bụ ihe eji arụ ọrụ plasma nke ọma emebere iji kwalite omume ihu wafer na etch semiconductor dị elu na gburugburu ebe nchekwa. Emepụtara site na CVD silicon carbide dị ọcha, mgbanaka ahụ na-enye nkwụsi ike pụtara ìhè, nkwụsi ike ọkụ dị mma, yana microstructure nwere otu nke ukwuu. Uru ihe ndị a na-enyere aka guzobe n'ọbọ na-agbanwe agbanwe, ịdị n'otu n'otu n'otu ka mma, yana nchebe ihu a pụrụ ịdabere na ya n'oge arụ ọrụ plasma dị elu. Anyị na-atụ anya ajụjụ gị ọzọ.
Description
N'ime nrụpụta semiconductor dabere na plasma dị elu, Semixlab CVD SiC Focus Ring na-arụ ọrụ dị oke mkpa n'ịkwado gburugburu usoro yana ịgba mbọ hụ na arụmọrụ ọkwa wafer na-agbanwe agbanwe. mgbanaka a na-elekwasị anya abụghị naanị ngwa a na-eri eri mana akụkụ injinia na-arụ ọrụ nke na-akpụzi omume plasma ozugbo na oke wafer. Site n'usoro gbara gburugburu mkpụrụ osisi ahụ, mgbanaka mgbanaka na-edozi nkesa ọkụ eletrik na mpaghara ma na-achịkwa nguzobe nke n'ọbọ plasma n'akụkụ ọnụ wafer. Mgbanwe a na-achịkwa na-ebelata ndahie usoro metụtara akụkụ-dị ka oke-etch, mgbagha profaịlụ, na ntinye enweghị ụdị-nke na-esite na nhụsianya ebumpụta ụwa nke njupụta plasma na ion trajectories dị nso na oke oghere.
Mgbanaka mgbanaka na-arụkwa ọrụ dị ka ihe mgbochi dị mkpa. Na gburugburu plasma nwere ike dị elu, akụkụ ndị ekpughere ekpughere na-enwe ike ibute mmerụ ahụ, micro-masking, na nbibi. Semixlab CVD SiC Focus Ring na-egbochi ụdị mmeghachi omume na mpaghara usoro kwesịrị ekwesị, na-echebe mpaghara wafer ma na-egbochi mmekọrịta kemịkalụ achọghị n'etiti plasma na ngwaike ụlọ. Nke a na-enye aka n'ịrụ ọrụ mwepu ihu ka mma yana mbelata enweghị ntụpọ, nke abụọ dị oke mkpa maka nrụpụta ngwaọrụ dị elu.
Ihe dịkwa mkpa bụ ọrụ mgbanaka n'ịkwado nkwụsi ike nke ọnụ ụlọ karịa ọrụ ngwa ọrụ agbatịkwuru. Na-enweghị mgbanaka mgbanaka emezigharị nke ọma, mgbidi ụlọ na ihe ndị mejupụtara electrostatic chuck na-enweta akwa akwa akwa, na-amụba ihe na iwebata usoro mkpagharị. Ihe mgbanaka Semixlab na-amịkọrọ ma na-eguzogide ọnọdụ plasma siri ike, na-eje ozi nke ọma dị ka interface ịchụ àjà a na-achịkwa. Geometry mebere ya na ihe CVD SiC dị ọcha dị elu na-eme ka njide plasma na-agbanwe agbanwe, omume ndụ a na-ebu amụma, yana nkwụsi ike nke akụkụ dị elu n'ofe ikuku na plasma ugboro ugboro.
Site na ijikọ ọrụ ndị a n'ime otu akụrụngwa dị elu dị elu, Semixlab CVD SiC Focus Ring na-enyere fabs aka nweta njikwa usoro siri ike, ịdị n'otu n'otu n'otu na-adịwanye mma, yana nkwughachi ogologo oge. Nke a na-eme ka mgbanaka mgbanaka ahụ bụrụ ntọala ntọala nke etch plasma ọgbara ọhụrụ na nyiwe nkwụnye ego karịa akụkụ dị nfe dị mfe, na-adakọ ozugbo na mkpa ụlọ ọrụ buru ibu nke nkwalite mkpụrụ, nkwụsi ike ngwá ọrụ na arụmọrụ akụrụngwa na-adigide.
Dị ka onye na-eduga CVD SiC Focus Ring emeputa na onye na-ebubata ya na China, anyị na-agba mbọ ịnye ụlọ ọrụ semiconductor etching ụlọ ọrụ nyocha teknụzụ dị elu yana ọrụ ngwaahịa ahaziri iche, yana nkwado azụmaahịa zuru oke. Semixlab na-atụsi anya ike ịbụ onye gị na ya na-akpakọrịta ogologo oge na China.
anyị Ọrụ
Ụlọ ahịa ngwaahịa Semixlab
