Otu esi ahọrọ mgbanaka nlezianya kwesịrị ekwesị maka nhazi plasma semiconductor?

Okwu Mmalite: Ihe Mere Mgbaaka Nlebara Anya Semiconductor Ji Dị Mkpa n'Ọrụ Mmepụta Dị Elu

N'ime mmepụta semiconductor nke oge a, inweta nnukwu mmepụta wafer na arụmọrụ ngwaọrụ na-aga n'ihu dabere ọ bụghị naanị na teknụzụ lithography na deposition dị elu kamakwa na njikwa ziri ezi nke ọnọdụ nhazi plasma. N'ime ọtụtụ ihe dị n'ime ụlọ etching plasma, Semiconductor Focus Ring na-arụ ọrụ dị oke mkpa mana a na-eledakarị anya.

Mgbaaka Focus bụ ihe e ji usoro nhazi nke ọma rụọ gburugburu nsọtụ wafer na chuck electrostatic (ESC). Ọrụ ya bụ isi bụ ịhazi nkesa plasma, ijikwa mpaghara eletriki dị n'akụkụ, na idobe mgbanwe ion otu otu n'elu wafer n'oge usoro nhazi plasma.

Ka ngwaọrụ semiconductor na-aga n'ihu na-aga n'ihu na-erute ebe dị elu, ebe nchekwa dị elu, na ngwaọrụ ike bandgap, ihe achọrọ maka ịkpụ plasma aghọọla ihe siri ike. Mgbanwe dị iche iche na nsọtụ wafer nwere ike imetụta njikwa akụkụ dị mkpa (CD), nhazi nha, mmepụta ntụpọ, na mmepụta mmepụta zuru oke.

Ya mere, ịhọrọ ihe mgbanaka Focus kwesịrị ekwesị aghọwo mkpebi injinia dị mkpa maka ndị na-emepụta akụrụngwa semiconductor na ákwà wafer.-gụnyere silicon, quartz, silicon carbide (SiC), alumina, na yttria seramiiki-na-enye uru dị iche iche dabere na kemistri plasma, okpomọkụ usoro, ihe achọrọ maka ndụ, na ụkpụrụ njikwa mmetọ.

Kedu ihe bụ mgbanaka focus semiconductor na gịnị ka ọ na-eme?

Mgbaaka Focus Semiconductor bụ ihe njikwa plasma okirikiri nke a na-ejikarị eme ihe na ngwa nkụcha akọrọ, gụnyere plasma capacitively coupled (CCP) na sistemụ plasma inductively coupled (ICP).

N'oge a na-akpụ ihe na plasma, etiti wafer na nsọtụ ya na-enwe gburugburu elektrọnik dị iche iche n'ihi na wafer anaghị agafe ókè anụ ahụ ya. Na-enweghị nkwụghachi ụgwọ, njupụta plasma, ike ion, na nkesa ubi eletrik dị nso na nsọtụ wafer nwere ike ịghọ ihe na-adịghị agbanwe agbanwe, na-emepụta mmetụta dị n'akụkụ dịka:

l Ọnụego etch na-abụghị otu

l Mgbanwe akụkụ dị oke mkpa

l Ịchacha akụkụ karịrị akarị

l Mgbagọ profaịlụ

l Mbelata mmepụta wafer

Mgbaaka Focus na-emepụta gburugburu plasma a na-achịkwa gburugburu wafer. Site n'inye ọnọdụ ókè eletriki na anụ ahụ yiri nke ahụ, ọ na-enyere aka ịnọgide na-enwe omume plasma na-aga n'ihu site na etiti ruo na nsọtụ wafer ahụ.

N'ọrụ mmepụta semiconductor dị elu, Mgbaaka Focus na-arụkọ ọrụ na ihe ndị ọzọ dị mkpa dị na ụlọ ahụ, gụnyere electrostatic chuck (ESC), isi ịsa ahụ, ihe mkpuchi ụlọ, na electrode elu, iji nweta ọnọdụ nhazi plasma kwụsiri ike.

Mgbaaka Lekwasị Anya nke Semiconductor nkịtịs

A na-ekpebi arụmọrụ nke mgbanaka Focus site na ihe onwunwe ya. Ndị na-emepụta semiconductor na-ahọrọ ihe dị iche iche dabere na kemistri plasma, ihe achọrọ maka usoro, na ndụ ihe mejupụtara ya.

1. Mgbaaka Lekwasị Anya nke Silicon

Silicon bụ otu n'ime ihe ndị a na-ejikarị eme ihe maka mgbanaka focus semiconductor, ọkachasị na nhazi silicon wafer.

Ebe ọ bụ na silicon nwere njirimara kemịkalụ yiri nke silicon wafer a na-ahazi, mgbanaka Silicon Focus nwere ike inye omume ịkọ ihe nke ọma na ịdị n'otu dị mma.

Ngwa ndị ahụkarị:

l Ịkpụ ihe e ji ekpuchi silikọn

l Ịkụnye ion miri emi (DRIE)

l Mmepụta ngwaọrụ logic

l Mmepụta ebe nchekwa

Uru kachasị dị na mgbanaka silicon Focus bụ ndakọrịta usoro. Ebe ọ bụ na wafer na Focus Ring na-emeghachi omume n'otu aka ahụ n'ọnọdụ plasma, enwere ike ibelata mmetụta dị n'ọnụ.

Agbanyeghị, silicon nwere obere nguzogide plasma ma e jiri ya tụnyere ihe seramiiki dị elu, nke na-eme ka ndụ ọrụ dị mkpụmkpụ na gburugburu plasma dị ike.

2. Mgbaaka Lekwasị Anya nke Silicon Carbide (SiC)

Mgbanaka Focus SiC aghọwo otu n'ime ihe kachasị mkpa maka ngwa itinye ihe na plasma dị elu.

Silicon carbide nwere ihe onwunwe dị mma, dịka:

l Nnukwu nguzogide mmebi plasma

l Igwe ọkụ dị elu

l Ike igwe dị elu

l Mmepụta obere ihe dị iche iche

l Nkwụsi ike akụkụ dị mma

A na-ejikarị mgbaaka SiC Focus eme ihe n'ọtụtụ ebe:

l Ịkụcha ihe na Dielectric

l Ịkụnye ihe n'ime oxide

l Nhazi semiconductor silicon carbide

l Mmepụta ngwaọrụ GaN

l Ngwa plasma dị elu

Ma e jiri ya tụnyere ihe silicon ma ọ bụ quartz ọdịnala, SiC na-enye ndụ dị ogologo ma kwụsie ike ka mma n'okpuru ọnọdụ plasma dị elu.

Maka imepụta ezi uche na ebe nchekwa dị elu, a na-ejikarị mgbanaka CVD SiC Focus Rings dị ọcha n'ihi njupụta ha dị elu, ịdị ọcha ha, na iguzogide plasma dabere na fluorine.

3. Mgbaaka Nlekwasị Anya nke Quartz

A na-eji Quartz eme ihe n'ọtụtụ ihe eji eme ihe na plasma n'ihi ịdị ọcha ya dị mma na ihe mkpuchi eletriki ya.

Uru gụnyere:

l Ịdị ọcha kemịkalụ dị elu

l Njirimara dielectric dị mma

l Omume eletriki kwụsiri ike

Agbanyeghị, quartz nwere obere ike okpomọkụ na obere iguzogide kemịkalụ plasma siri ike dịka gas etching based fluorine.

4. A na-ahụkarị mgbaaka Quartz Focus na:

l Usoro semiconductor tozuru okè

l Sistemụ PECVD

l Ngwa plasma dị obere ike

Maka nrụpụta dị elu, a na-eji SiC na ihe seramiiki dị elu dochie quartz nke ọma.

5. Alumina (Al₂O₃) Mgbaaka Nlebara Anya

Mgbaaka Alumina seramiiki Focus na-enye ezigbo ike igwe, mkpuchi eletriki, na uru ọnụ ahịa.

A na-ejikarị ha eme ihe na:

l Ịmepụta plasma n'ozuzu

l Ngwa Semiconductor

l Gburugburu plasma na-adịghị ike

Ọ bụ ezie na alumina na-enye ezigbo nguzogide plasma, arụmọrụ ya n'okpuru oke mkpughe plasma fluorine na-adịkarị ala karịa seramiiki SiC ma ọ bụ yttria.

6. Yttria (Y)₂O₃) Mgbaaka Nlebara Anya

Yttria seramiiki adọtala mmasị na-abawanye ụba na mmepụta semiconductor dị elu n'ihi na ọ na-eguzogide plasma fluorine nke ọma.

Isi uru gụnyere:

l Mmepụta ihe dị oke ala

l Nguzogide nchara plasma dị mma

l Ogologo oge ndụ ọrụ

A na-ejikarị Yttria Focus Rings eme ihe na:

l Mmepụta ebe nchekwa dị elu

l Ịcha akụkụ dị elu (HAR)

l Usoro plasma nke ọgbọ na-abịa

Ihe kacha mkpa bụ ọnụ ahịa nrụpụta dị elu n'ihi ihe ndị dị mkpa maka nhazi seramiiki.

Ntụnyere Ihe Mgbaaka Focus nke Semiconductor

Kedu otu esi ahọrọ mgbanaka kwesịrị ekwesị maka nhazi Plasma?

Ịhọrọ mgbanaka Plasma Etching Focus nke ziri ezi chọrọ nhazi arụmọrụ usoro, ogologo oge ihe, na ọnụ ahịa zuru oke nke ihe onwunwe.

Ihe ndị dị mkpa gbasara nyocha gụnyere:

1. Ndakọrịta Kemistri Plasma

Gas dị iche iche dịka CF₄, CHF₃, NF₃, SF₆, na Cl₂ mepụta gburugburu nchara dị iche iche. A ga-ahọrọ ihe ndị ahụ dịka ọnọdụ ikpughe plasma si dị.

2. Ịkwụsi Ike n'Okpomọkụ Usoro

Usoro nhazi dị elu na-emepụta nrụgide okpomọkụ dị ukwuu. Ihe ndị nwere ike ime ka okpomọkụ dịkwuo elu na mgbasawanye okpomọkụ dị ala, dị ka SiC, na-enye nkwụsi ike ka mma.

3. Njikwa ihe ndị na-adịghị arụ ọrụ

Maka oghere semiconductor dị elu, mmetọ ihe ndị dị na ya na-emetụta mmepụta ozugbo. Ihe SiC na yttria dị ọcha na-enye ezigbo nkwụsi ike n'elu na mmepụta obere ihe.

4. Ogologo ndụ na arụmọrụ ọnụ ahịa

Ọ bụ ezie na seramiiki dị elu nwere ike ịnwe ọnụ ahịa mbụ dị elu, ogologo ndụ ha na mbelata ugboro ole ha na-arụzi nwere ike ibelata ọnụ ahịa ọrụ akụrụngwa niile nke ukwuu.

Ajụjụ

Q1: Gịnị bụ mgbanaka lekwasịrị anya na Semiconductor?

Mgbaaka Focus Semiconductor bụ ihe njikwa plasma nke etinyere gburugburu nsọtụ wafer na ngwa nkụcha akọrọ. Ọ na-enyere aka idobe nkesa plasma otu ma na-eme ka arụmọrụ ịkpụcha akụkụ wafer ka mma.

Q2: Gịnị mere e ji eji SiC eme ihe maka mgbanaka focus semiconductor?

A na-eji SiC eme ihe nke ukwuu n'ihi ezigbo nguzogide nchara plasma ya, ike okpomọkụ dị elu, ike igwe, na obere mmepụta ihe dị iche iche, na-eme ka ọ dabara adaba maka usoro ịcha akwa dị elu.

Q3: Kedu ihe eji eme mgbaaka Semiconductor Focus?

Ihe ndị a na-ahụkarị dịka mgbanaka nchebara echiche gụnyere Silicon, Quartz, Silicon Carbide (SiC), CVD SiC, Alumina, na Yttria (Y)₂O₃) seramiiki.

Q4: Kedu ka m ga-esi họrọ ihe mgbanaka Focus kwesịrị ekwesị?

Nhọrọ ahụ dabere na kemistri plasma, okpomọkụ usoro, ihe achọrọ maka ịcha ihe, njikwa mmetọ, atụmanya ndụ, na ọnụ ahịa zuru oke nke onye nwe ya.

Q5: Kedu ihe dị iche n'etiti mgbanaka Silicon na SiC Focus?

Mgbaaka Silicon Focus na-enye nkwado usoro dị mma maka ịkpụ silicon, ebe Mgbaaka SiC Focus na-enye nguzogide plasma ka mma, ndụ ogologo oge, na nkwụsi ike ka mma maka usoro semiconductor dị elu.