Efere nkesa gas 0020-31624

N'imepụta semiconductor dị elu, otu usoro na nkwụsi ike plasma na-adabere nke ukwuu na nhazi nke nnyefe gas n'ime ụlọ ọrụ ahụ. Plate nkesa gas (GDP), nke a makwaara dị ka efere isi ịsa ahụ, bụ otu n'ime ihe ndị kachasị mkpa maka inweta arụmọrụ nkwụnye na ịrụ ọrụ nkwụsi ike na akụrụngwa semiconductor dabere na plasma. Semixlab na-enye ihe nnọchi dị elu na nkesa gas semiconductor ahaziri ahazi maka gburugburu mmepụta wafer siri ike.

Product Isi

AMAT 0020-31624 Gas Distribution Plate bụ akụkụ nkesa gas nke e ji usoro nhazi semiconductor mee nke ọma, nke a na-ejikarị eme ihe na sistemụ nhazi ihe ndị e ji ihe mee (AMAT).

E mere ya maka gburugburu plasma dị elu, ihe a na-enye ohere ka nnyefe gas usoro ziri ezi ma kwụsie ike n'ofe wafer ahụ, na-enyere aka ịnọgide na-enwe nguzozi usoro dị mma, ịdị n'otu ihe nkiri, na nkwụsi ike plasma.

Key Atụmatụ:

● Nhazi nkesa gas dị oke nkenke

● Nguzogide nchara plasma dị mma

● Mmepụta obere ihe dị iche iche

● Nhazi usoro mmegharị mmiri kachasị mma

● Nkwụsi ike dị elu nke okpomọkụ n'okpuru ọnọdụ nhazi plasma

● Dabara adaba maka itinye ihe na-etinye semiconductor na ngwa etching

Ọrụ Ndị A Na-arụ na Sistemụ AMAT

Na sistemụ nhazi plasma AMAT, a na-etinyekarị efere nkesa gas n'ebe dị elu nke ụlọ ọrụ ahụ, kpọmkwem n'elu ebe nhazi wafer.

Ọrụ ya bụ isi bụ ikesa gas usoro n'otu ụzọ ahụ n'ime mpaghara mmeghachi omume plasma ebe ọ na-edobe usoro gas kwụsiri ike na njupụta plasma n'ofe elu wafer.

Ọrụ Ndị Dị Mkpa Gụnyere:

1. Nkesa Gas Usoro Otu

GDP na-ekesa kpọmkwem gas dịka:

SiH₄, NH₃, CF₄, O₂, NF₃, Ar

2. Njikwa Nha nhata nke Plasma

Nhazi na ụkpụrụ oghere nke efere nkesa gas na-emetụta ozugbo:

● nkesa njupụta plasma

● nha nhata ion

● nguzosi ike nke mmeghachi omume

3. Nhazi Ọgba Mmiri

Nhazi GDP dị elu na-enyere aka imeziwanye:

● oge obibi gas

● arụmọrụ ngwakọta mbụ

● usoro mmiri ụlọ

Kedu ihe na-eme ma GDP daa?

N'ihi na efere nkesa gas na-achịkwa omume nke usoro gas nke ụlọ ahụ kpọmkwem, mmebi ma ọ bụ mmetọ nke ihe mejupụtara ya nwere ike imetụta arụmọrụ usoro na mmepụta mmepụta nke ukwuu.

Nsogbu Ndị A Na-ahụkarị Maka Mmebi Ihe Gụnyere:

1. Enweghị Nha nhata nke Gas Flow

Oghere gas a kpọchiri akpọchi ma ọ bụ nke gbajiri agbaji nwere ike ibute nkesa gas na-adịghị mma, nke na-ebute:

● mgbanwe ọkpụrụkpụ ihe nkiri ahụ

● ihe e ji achọ mma nke na-abụghị otu

● omume plasma na-adịghị akwụsi ike

2. Mmụba nke mmepụta ihe ndị dị n'ime ya

Mbibi elu ma ọ bụ mmebi mkpuchi nwere ike itinye ihe ndị dị n'ime ụlọ ahụ, na-eme ka ihe egwu nke mmetọ dịkwuo elu ma na-ebelata mfu nke ihe.

3. Enweghị ike ịrụ ọrụ na Plasma

Oke GDP mebiri emebi nwere ike ịgbanwe njirimara plasma, na-emetụta:

● nguzosi ike nke nkwụnye ego

● ike imeghachi ihe etch

● nkwụsi ike nke usoro ụlọ

● Mbelata Mmụba Usoro

N'ime mmepụta semiconductor dị elu, ọbụlagodi obere mmebi GDP nwere ike ibute ntụpọ ọkwa wafer na mbelata arụmọrụ mmepụta. N'ihi nke a, inyocha, mmezi, na nnọchi nke ihe GDP mgbe niile dị mkpa maka ọrụ mmepụta semiconductor kwụsiri ike.

AMAT 0020-31624 Gas Distribution Plate bụ akụkụ dị mkpa nke ụlọ semiconductor nke na-ahụ na ekesara gas na nha anya plasma, na-akwado nkwụnye ego kwụsiri ike, arụmọrụ etching, na mmepụta semiconductor dị elu.

Gịnị mere ị ga-eji họrọ Semixlab?

Na Semixlab, anyị bụ ọkachamara n'ihe gbasara usoro semiconductor dị elu nke e mepụtara maka ojiji dị elu, nke na-emetụta mmetọ, na nke na-adịghị emetụta okpomọkụ.

Anyị na-enye:

● Akụkụ nnọchi semiconductor ziri ezi

● Ngwọta nrụpụta GDP ahaziri ahazi

● Nkwado injinia ihe dị elu

● Akụkụ usoro semiconductor dị ọcha

maka ihe ndị na-emepụta semiconductor, OEM, na gburugburu mmepe usoro dị elu n'ụwa niile.

Kpọtụrụ Semixlab taa iji chọpụta ihe ngwọta a pụrụ ịdabere na ya maka ihe gbasara ụlọ semiconductor maka usoro gị.

Ngwa Ndị A Na-ejikarị Emepụta Semiconductor

A na-eji efere nkesa gas eme ihe nke ọma n'usoro semiconductor emelitere na plasma ebe nnyefe gas ziri ezi na nkesa plasma otu dị oke mkpa.

1. PECVD (Mkpofu ikuku kemịkalụ emelitere nke Plasma)

GDP na-arụ ọrụ dị mkpa na:

● Ntinye ego SiNx

● Ntinye ego SiO₂

● nhazi oyi akwa passivation

● nhazi ihe nkiri dị gịrịgịrị dielectric

2. Plasma Etching

Na sistemụ etching semiconductor, GDP na-enyere aka mee ka plasma kwụsie ike ma hazie usoro gas maka:

● Ịkụcha ihe na-adịghị agbanwe agbanwe

● Ịkpụcha oxide

● ihe e ji eduzi ihe

● usoro nhicha ụlọ

3. Usoro CVD / ALD dị elu

N'ụfọdụ sistemụ nkwụnye ego, a na-ejikwa efere nkesa gas iji kwado:

● nkewa mbụ

● njikwa gas pulse

● nhazi ihe nkiri dị gịrịgịrị nke nwere obere ihe