Mgbaaka Akara Isostatic Graphite Dị Ọcha Dị Elu

A na-eji graphite dị ọcha nke ukwuu nke e tinyere n'ime ya emepụta mgbaaka mkpuchi Graphite dị elu nke Semixlab, mgbaaka mkpuchi ndị a na-enye arụmọrụ mkpuchi siri ike, nke na-adịghị emerụ ahụ nke na-akwado ntụkwasị obi usoro, nguzosi ike nke mkpụrụ, na oge ọrụ akụrụngwa n'ofe usoro mmepụta wafer dị elu.

N'ime sistemu epitaxy, ebe njikwa ziri ezi nke mmiri gas, nkwụsi ike nrụgide, na nha nha okpomọkụ dị mkpa, mgbanaka Sealing Graphite nke Semixlab na-arụ ọrụ dị oke mkpa n'ịnọgide na-eguzosi ike n'ezi ihe nke reactor na okpomọkụ na-adịgide adịgide nke na-agafekarị 1000 °C. E tinyere ya na njikọ ụlọ, ókè mkpuchi, na nkwonkwo na-agbanwe agbanwe ma ọ bụ na-anọpụ iche n'ime mpaghara ọkụ, mgbaaka mkpuchi ndị a na-egosipụta mmụba okpomọkụ dị ala na isotropic, na-enye ha ohere ịnọgide na-enwe nkwụsi ike nha n'oge ịgbagharị okpomọkụ ugboro ugboro. Ọdịnaya adịghị ọcha metal ha dị oke ala na-ebelata ihe egwu nke itinye dopant n'amaghị ama ma ọ bụ mmetọ ígwè, na-enyere aka hụ na ọkpụrụkpụ oyi akwa epitaxial dị otu, profaịlụ doping a na-achịkwa, na uto kristal dị elu na usoro epitaxy semiconductor silicon na compound semiconductor.

N'ọrụ CVD, LPCVD, na PECVD, a na-ekpughe ihe ndị mejupụtara mkpuchi ahụ na njikọta nke okpomọkụ dị elu, ikuku, gas precursor corrosion, na n'ọnọdụ ụfọdụ gburugburu plasma. A na-eji mgbanaka Sealing Graphite Graphite dị elu nke Semixlab eme ihe nke ukwuu na mkpuchi ọnụ ụzọ ụlọ, nhazi nkewa gas, na mpaghara mgbanwe n'etiti mpaghara ọkụ na oyi nke reactor ahụ. Nguzogide kemịkalụ dị n'ime nke graphite dị ọcha na-eme ka ọrụ kwụsie ike n'ihu gas usoro siri ike dịka HCl, NH₃, na ihe ndị na-ebute ụzọ dabere na halogen, ebe obere nhazi isotropic dị oke, na-ebelata mmepụta ihe na mmebi igwe n'ime ndụ ọrụ agbatịkwuru. Ma e jiri ya tụnyere ngwọta sealing metal, mgbanaka sealing graphite na-enye iguzogide dị elu megide corrosion na ike ọgwụgwụ okpomọkụ, na-enye aka na oge mmezi ogologo oge na mmezi usoro ka mma na nrụpụta olu dị elu.

Mgbasa dị elu, oxidation, na nhazi okpomọkụ ngwa ngwa na-etinye nnukwu mkpa na arụmọrụ mkpuchi n'ihi oke okpomọkụ, ọnụego ọsọ ọsọ nke okpomọkụ, na usoro ịgbagharị ugboro ugboro. N'ebe ndị a, mgbanaka Sealing Graphite nke Semixlab High-Purity Isostatic Graphite na-anọgide na-eguzosi ike n'ihe mkpuchi na okpomọkụ karịrị 1100 °C, na-akwado njikwa ikuku kwụsiri ike n'ime ọkpọkọ ọkụ na ụlọ RTP. Njirimara igwe kwụ otu ebe nke nrụgide isostatic na-enye na-enyere aka igbochi njupụta nrụgide mpaghara, obere mgbawa, na mgbagọ mkpuchi n'oge ọkụ na oyi ngwa ngwa, si otú a na-enye aka na profaịlụ mgbasa dopant kwụsiri ike, uto oxide otu, na nsonaazụ usoro okpomọkụ a na-emegharị ugboro ugboro dị mkpa maka nrụpụta ngwaọrụ echiche dị elu na ebe nchekwa.

N'usoro Etch, gụnyere ngwa e ji ekpocha ihe nke na-eji kemistri dabere na halogen na gburugburu plasma enyere aka, a chọrọ mgbaaka e ji emechi ihe iji nọgide na-enwe ezi ihe ikuku ma na-egbochi mmepụta ihe na mmebi kemịkalụ. A na-etinyekarị mgbanaka Sealing Graphite dị elu nke Semixlab n'ebe ndị na-anaghị ekpughe plasma kpọmkwem, dị ka ebe mkpuchi ụlọ dị n'akụkụ na mpaghara nkewa nke ihe owuwu. Mgbe ejikọtara ya na njupụta elu ma ọ bụ mkpuchi nchebe kwesịrị ekwesị, mgbaaka mkpuchi ndị a na-enye nguzogide a pụrụ ịdabere na ya na gas etch na-emebi emebi na nrụgide okpomọkụ, na-akwado ọnọdụ ụlọ kwụsiri ike ma na-ebelata ihe egwu nke mfu mkpụrụ metụtara mmetọ.

E ji nlezianya mee ya site n'ilekwasị anya n'ịdị ọcha nke ihe, nkwụsi ike nke ihe owuwu, na ntụkwasị obi ogologo oge, ndakọrịta nke mgbanaka Sealing Graphite nke Semixlab na teknụzụ mkpuchi dị elu na njikọta na usoro ihe owuwu semiconductor dị mgbagwoju anya na-eme ka ha bụrụ ihe ngwọta a pụrụ ịtụkwasị obi maka ndị na-emepụta ihe na ndị tozuru okè. Site n'inye arụmọrụ mkpuchi mgbe niile n'okpuru ọnọdụ usoro kachasị mkpa, Semixlab na-akwado ndị na-emepụta semiconductor n'inweta mmụba dị elu, iji akụrụngwa eme ka mma, na obere ọnụ ahịa nke inwe. Anyị na-atụ anya ịbụ onye mmekọ ogologo oge gị na China.