Igwe ọkụ graphite mkpuchi TaC

Kedu ihe kpatara ịhọrọ Semixlab?

Semixlab nwere ike ịnye igwe ọkụ graphite mkpuchi TaC n'ụdị ahaziri iche na nkọwapụta dabere na ụdị akụrụngwa akọwapụtara nke ndị ahịa yana usoro chọrọ. Biko kpọtụrụ anyị maka nkọwa zuru ezu nke paramita teknụzụ, gụnyere mana ọnweghị oke na:

- oke ndidi

- Okpomọkụ kachasị arụ ọrụ

- Data ihe onwunwe dị ka thermal conductivity

- Graphite akara ule na ịdị ọcha

- TaC mkpuchi ọkpụrụkpụ oke na njirisi otu

Nke kachasị mkpa, ihe ndị na-ekpo ọkụ nke Semixlab na-eme ka ọ bụrụ ihe dị elu nke graphite dị ọcha nke ejiri mkpuchi TaC (Tantalum Carbide) dị elu, nke na-enye nchikota nke ihe ọkụkụ dị mma nke ọma na nke a na-ejikọta ezigbo okpomọkụ na nkwụsi ike dị elu. Anyị na-eji ihe graphite sitere na ndị na-ebubata ihe atọ a ma ama nke ọma n'ụwa, yana ndị mmekọ anyị kwụsiri ike ogologo oge gụnyere SGL (Germany), Toyo Tanso (Japan), na Mersen (France), iji hụ na ngwaahịa anyị nwere mmesi obi ike dị mma sitere na isi mmalite. N'otu oge ahụ, Semixlab's TaC mkpuchi usoro bụ na-eduga larịị na ụlọ ọrụ, na ya denseness, adhesion na corrosion eguzogide ka a kwadoro site n'ọtụtụ agba nke nkwado usoro, na-eji ya n'ọtụtụ ebe na elu-ọgwụgwụ SiC epitaxial ngwá ọrụ, nke ndị ahịa tụkwasịrị obi nke ukwuu.

Ngwa isi: Ebe ikpo ọkụ dị egwu na ngwa SiC Epitaxy

Igwe ọkụ graphite nwere mkpuchi nke Semixlab na-arụ ọrụ dị oke mkpa na akụrụngwa epitaxy SiC. Isi ọrụ ya bụ ime ihe dị ka ntọala maka usoro kpo oku, na-ebu ma na-ekpo ọkụ nke Wafer Susceptor etinyere n'elu ya.

Ọkwa nhazi: N'ime ụlọ SiC epitaxial a na-ahụkarị, usoro a na-abụkarị ndị a:

1. TaC na-ekpo ọkụ graphite (Semixlab Product): N'ịbụ nke dị na ala ala, ọ bụ isi iyi ọkụ.

2. Wafer Susceptor: A na-etinye ya n'elu ikpo ọkụ, a na-ejikarị graphite dị ọcha ma ọ bụ ihe ndị ọzọ na-eguzogide okpomọkụ ma nwee ike kpuchie ya. A na-eji ụzọ ya emebere nkenke iji jide wafer SiC.

3. SiC Wafers (Wafer): Edobere na diski nke na-ebu, ha bụ mkpụrụ maka uto ikpeazụ nke oyi akwa epitaxial.

Usoro ikpo oku na ihe ịma aka:

1. Achọrọ oke okpomọkụ: Uto nke SiC epitaxial na-achọkarị okpomọkụ dị oke elu (nke na-adịkarị karịa 1500∘C ma ọ bụ karịa) iji hụ na ire ere gas na-aga nke ọma na nhazi nke ọkwa SiC dị elu, otu-crystalline SiC n'elu wafers. Ndị na-ekpo ọkụ nke Semixlab na-adabere na mkpụrụ nke graphite dị ọcha dị elu, nke na-eme ka ọ dị elu iji hụ na a na-enweta okpomọkụ dị elu achọrọ ma kwado ya n'otu n'otu. Igwe ọkụ nke Semixlab na-eji graphite dị ọcha dị elu yana nrụpụta ọkụ dị elu dị ka mkpụrụ iji hụ na erute oke okpomọkụ achọrọ ma debe ya ngwa ngwa na otu.

2. Ịdị n'otu dị oke egwu: Ịdị n'otu okpomọkụ nke elu igwe na-ekpo ọkụ na-emetụta kpọmkwem nkesa okpomọkụ nke diski na-ebu ya, nke n'aka nke ya na-ekpebi nguzosi ike nke uto uto, ọkpụrụkpụ epitaxial oyi akwa, na ntinye doping n'ebe ọ bụla na wafer. Mmụba okpomọkụ ọ bụla nwere ike iduga nrụrụ dị ukwuu na oyi akwa epitaxial na mgbanwe dị ukwuu na arụmọrụ ngwaọrụ, na Semixlab na-ebuli nkesa ebe okpomọkụ nke ikpo ọkụ iji belata mgbanwe okpomọkụ site na nhazi ọkaibe na usoro mmepụta ihe.

3. Ihe ịma aka nkwụsi ike nke kemịkalụ: A na-agafe gas na-emebi emebi nke ukwuu (dịka, silane, propane, hydrogen, na gas dopant) site na usoro epitaxial. N'ebe okpomọkụ dị elu, ikuku ndị a na-eme ihe ike na graphite nkịtị, na-eme ka mmebi aka na-emebi emebi na ihe ndị graphite ma na-ahapụ carbon carbon nke na-emerụ ụlọ mmeghachi omume na wafers, na-emetụta àgwà nke oyi akwa epitaxial na mkpụrụ ngwaọrụ.

Semixlab TaC mkpuchi mkpuchi na uru:

Ọ bụ nzaghachi nye nsogbu ndị a ka Semixlab na-eji teknụzụ mkpuchi Tantalum Carbide (TaC) dị elu. Ihe mkpuchi TaC na-enye ndị na-ekpo ọkụ graphite arụmọrụ ka mma:

1. Mbelata urughuru mbịpụta yana mmụpụta emelitere: Site n'igbochi nbibi na chalking nke mkpụrụ graphite nke ọma, mkpuchi TaC na-ebelata isi iyi nke obere ihe sitere na ụlọ usoro na isi mmalite. Site n'igbochi nke ọma nbibi na nbibi nke mkpụrụ okwu graphite, mkpuchi TaC na-ebelata isi iyi nke ihe dị n'ime ụlọ usoro site na isi iyi, nke dị oke mkpa maka mmepụta nke SiC epitaxial wafers dị elu nke nwere obere ntụpọ ntụpọ, ma na-enye aka ozugbo na mkpụrụ nke ngwaọrụ ikpeazụ.

2. Mmasị kemịkalụ inertness na nguzogide corrosion: Nkwụsi ike kemịkalụ dị elu nke mkpuchi TaC yana obere uzuoku na-echebe mkpụrụ graphite ka ọ ghara imeghachi omume na gas usoro na oke okpomọkụ yana na ikuku na-emebi emebi. Nke a na-ebelata oke mmetọ ahụ n'ihi ikpo ọkụ ọkụ, na-eme ka ịdị ọcha nke ebe uto epitaxial dị ọcha, na-eme ka ogo nke epitaxial oyi akwa na ntụkwasị obi ngwaọrụ.

3. Usoro kwụsie ike na ugboro ugboro: Igwe ọkụ kwụsiri ike, ogologo ndụ bụ ntọala maka nkwụsi ike na nkwụsi ike nke inter-batch (batch-to-batch) na intra-batch (n'ime-batch), nke Semixlab's TaC-conated graphite heaters na-enye, na-eme ka usoro SiC epitaxial gị bụrụ nke a pụrụ ịdabere na ya na njikwa.

4. Ogologo ndụ gbatịkwuru na mbelata ụgwọ ọrụ: Njupụta na nchikota siri ike nke mkpuchi TaC na-eme ka ịdịte aka nke ọkụ graphite dịkwuo elu, na-agbatị ndụ ọrụ ya n'okpuru ọnọdụ ọrụ na-achọsi ike. Nke a pụtara obere oge maka mmezi yana obere nnọchi nke akụkụ ahụ mapụtara na-ebelata nke ọma, nke na-ebelata ọnụ ahịa nke onye ahịa nke ọma.

5. Ịnọgide na-enwe ezigbo okpomọkụ: Usoro mkpuchi TaC ejiri nlezianya mee nke ọma na-enye nchebe dị mma ma na-ejigide ike dị elu nke ịdị ọcha nke graphite substrate dị mma, na-ahụ na a na-ebufe ọkụ nke ọma na n'otu n'otu na tray wafer na wafers n'elu maka njikwa okpomọkụ.