Ahaziri sic mkpuchi wafer susceptor

Susceptor nke SiC mkpuchi mkpuchi bụ ihe dị oke mkpa na nrụpụta semiconductor, ọkachasị na usoro uto epitaxial dị ka MOCVD, PECVD, na CVD. Ọ na-eje ozi dị ka onye na-ebu kwụsiri ike nke na-akwado wafers n'okpuru oke okpomọkụ, ihe na-emebi emebi, na gburugburu oghere, na-eme ka nnyefe okpomọkụ otu na nhazi enweghị mmetọ. Site n'itinye mkpuchi CVD SiC n'elu onye na-ahụ maka graphite dị elu, onye susceptor na-ejikọta arụmọrụ ọkụ dị mma yana nguzogide kemịkalụ dị elu - na-eme ka ọ dị mkpa maka mmepụta semiconductor ọgbọ ọzọ.

Ihe mejupụtara & Njirimara anụ ahụ

A na-emepụta Susceptor SiC Wafer Susceptor nke Semixlab site na iji ihe abụọ bụ isi:

CVD SiC mkpuchi

● Ike pụrụ iche (Mohs 9+) na ogologo oge

● Ịdị ọcha dị elu (> 99.999%) iji belata ọgbọ irighiri ihe

●Ekempe kemịkalụ inertness megide gas na-emebi emebi (HCl, NH₃, H₂, wdg)

● Nkwụsi ike nke okpomọkụ ruo ** 1600 ° C

●Dense, edo mkpuchi ọkpụrụkpụ maka ogologo ndụ ọrụ

Susceptor Graphite Dị Ọcha

● High thermal conductivity maka nkesa okpomọkụ kwụsiri ike

● Ọdịdị dị arọ tụnyere ceramik monolithic

●Ezigbo-machid na-egbo siri ike wafer flatness chọrọ

●Stable n'ibu ike n'okpuru thermal ịgba ígwè

Ngwongwo ndị a jikọtara ọnụ na-eme ka ihe mkpuchi mkpuchi SiC na-eguzogide nke ukwuu maka ujo ọkụ, mbuze plasma, na mmetọ ahụ, na-eme ka mma wafer na-agbanwe agbanwe.

Ngwa na nhazi Semiconductor

A na-eji susceptor nke SiC mkpuchi kpuchie ya na usoro semiconductor dị elu, ọkachasị na:

●Epitaxial Wafer Growth (Epi Wafer Manufacturing): Na-eme ka ikpo ọkụ n'otu ma na-ebelata ụta wafer n'oge ntinye epitaxial nke SiC, GaN, GaAs, na semiconductors ndị ọzọ.

●MOCVD & CVD usoro: Na-enye ihe kwụsiri ike na kemịkalụ, elu dị elu maka ntinye ihe nkiri dị mkpa.

●LED & Ike Semiconductor mmepụta : Na-akwado ọkụ ọkụ ọkụ ọkụ ọkụ ọkụ na ihe bandgap sara mbara n'ime ụlọ uto na-ekpo ọkụ.

● Ọkụkụ & Mgbasa Ọkụkụ: Na-ejigide nkwụsi ike nhazi n'okpuru usoro okpomọkụ ugboro ugboro ma na-egbochi mmetọ.

Site n'ịkwalite mbufe ọkụ na idowe iguzosi ike n'ezi ihe nke elu, onye na-ahụ maka ihe na-emetụta kpọmkwem mkpụrụ wafer, ịdị n'otu, na mbelata ntụpọ - na-eme ka ọ bụrụ akụkụ dị mkpa dị mkpa na ahịrị usoro epitaxial.

Uru asọmpi Semixlab

Na Semixlab, anyị na-enye ihe karịrị ọkọlọtọ ọkọlọtọ-anyị na-ebuga azịza ahaziri nke na-emezu ihe achọrọ nke ndị nrụpụta semiconductor:

Ọkachamara nhazi

Chepụta na imepụta ihe ndị na-enyo enyo n'ụdị dị iche iche, ọdịdị, ọkpụrụkpụ mkpuchi, na geometry iji dakọọ kpọmkwem MOCVD/CVD reactors.

Ihe njide Wafer SiC kpuchie

Silicon Carbide mkpuchi Wafer Susceptor

Ntụle nka nka

Ndị otu injinia ndị ọkachamara na-enye ndụmọdụ gbasara usoro iji kwalite mkpụrụ wafer na ịgbatị ndụ susceptor.

Nnwale ọnọdụ dị oke egwu

Ngwaahịa niile na-enweta nnwale siri ike maka nkwụsi ike ọkụ, nguzogide kemịkalụ, yana ogologo oge n'ọrụ n'okpuru ezigbo usoro.