0200-10377 Mgbaaka Otu 195mm Ụlọ DPS

Ejiri ihe seramiiki dị ọcha nke nwere ọkwa semiconductor na teknụzụ igwe eji arụ ọrụ nke ọma rụọ ya, ihe mejupụtara mgbanaka seramiiki a na-enye nguzogide pụrụ iche megide mbuze plasma, ịgbagharị okpomọkụ, na mmepụta ihe na gburugburu ebe a na-akụ ihe kpọrọ nkụ.

Ụlọ DPS nke AMAT 0200-10377 Ring Single 195mm bụ ihe e ji eme mgbaaka seramiiki nke a na-ejikarị eme ihe na sistemụ AMAT DPS (Decoupled Plasma Source) maka ngwa nhazi wafer 200mm.

Key Atụmatụ:

● Ihe seramiiki dị ọcha nke ukwuu

● Ndakọrịta plasma RF dị mma

● Mmetọ dị ala na mmepụta ihe dị iche iche

● Nguzogide mbuze plasma dị elu

● Nkwụsi ike dị elu n'ime igwe na okpomọkụ

● Nhazi nhazi maka njikọta ụlọ DPS

Ọrụ na Sistemụ DPS AMAT

Na sistemụ AMAT DPS plasma etching, Ring Single 195mm Ceramic Component na-arụ ọrụ dị ka akụkụ dị mkpa nke njikwa plasma na nchekwa ụlọ.

Njikwa Ọdịdọ Plasma

Mgbanaka seramiiki ahụ na-enyere aka ime ka nkesa plasma dị mma n'akụkụ nsọtụ wafer, na-eme ka nhazi nke ihe e ji ekpuchi ihe dịkwuo mma ma na-ebelata mgbanwe usoro n'akụkụ n'oge nhazi plasma dị elu.

Nchedo ESC na Ụlọ

E tinyere mgbanaka ahụ gburugburu ebe electrostatic chuck (ESC), mgbanaka ahụ na-arụ ọrụ dị ka ihe mgbochi nchebe megide kemịkalụ plasma siri ike, na-enyere aka belata mbuze ụlọ ma na-agbatị ndụ akụkụ ahụ.

Nkwado Plasma RF

Site na njirimara dielectric kwụsiri ike, mgbanaka seramiiki na-enyere aka na njikọta RF ka mma na nkwụsi ike plasma n'ime ụlọ DPS.

Mbelata mmetọ

Ọdịdị seramiiki ya dị ọcha nke ukwuu na-ebelata mmepụta ihe na mmetọ ígwè, na-akwado mkpa dị elu maka ịdị ọcha nke usoro semiconductor.

Ngwa Ndị A Na-ejikarị Eme Ihe na Usoro Semiconductor

A na-eji AMAT 0200-10377 Ring Single 195mm DPS Chamber eme ihe n'ọtụtụ ebe n'ịkọcha akọrọ na nhazi plasma dị elu, gụnyere:

Ịchacha Dielectric: Na-akwado omume plasma kwụsiri ike n'oge usoro nhazi oxide na dielectric layer.

Oxide na Contact Etch: Na-enyere aka melite nhazi etch na njikwa ọnụ wafer na kọntaktị na site na usoro nhazi.

Ịkpụcha ígwè: Na-enye nchebe ụlọ na nkwụsi ike usoro na gburugburu ebe a na-etinye plasma metal.

Nhazi Plasma Dị Elu: Dabara adaba maka ngwa plasma dị elu nke chọrọ obere mmetọ ihe na arụmọrụ RF kwụsiri ike.

Mmepụta Semiconductor 200mm: Emebere ya nke ọma maka sistemụ AMAT DPS nke na-ahazi wafers nke dị sentimita 8 n'ime ihe ndị e ji semiconductor rụọ.

Gịnị kpatara Semixlab?

Semixlab bụ ọkachamara na ihe seramiiki semiconductor dị elu maka ịcha plasma, itinye ego, na ngwa nhazi okpomọkụ.

Anyị na-enye:

● Ihe seramiiki nke ọkwa semiconductor

● Ike nhazi nkenke

● Akụkụ semiconductor dakọtara na OEM

● Njikwa mma kwụsiri ike

● Ngwọta seramiiki ahaziri ahazi

Ọrụ anyị bụ ịkwado ndị na-emepụta semiconductor na ngwọta ihe a pụrụ ịdabere na ya, nke dị elu maka akụrụngwa mmepụta wafer ọgbọ na-abịa.