Mgbaaka mpịachi 0200-15001

Mgbaaka Mkpọchi AMAT 0200-15001 bụ otu n'ime ihe ndị bụ isi dị na ụlọ akụrụngwa semiconductor Applied Materials (AMAT). Ọ bụ ihe mkpuchi/mkpakọ seramiiki alumina dị elu (Al₂O₃) nke a na-ejikarị eme ihe n'ọtụtụ modulu usoro nkwụnye na ịcha. Isi uru ya adịghị na isonye kpọmkwem na mmeghachi omume, kama ọ bụ n'ịnọgide na-enwe nkwụsi ike nhazi nke ụlọ ahụ na ịdị n'otu nke gburugburu usoro ahụ.

1. Nchịkọta Ngwaahịa na Njirimara Ihe (Al₂O₃)

● Aha Ngwaahịa: Mgbaaka Mkpọchi AMAT 0200-15001

● Ụdị: Mgbaaka Mkpuchi Ụlọ Ceramic / Ihe Mkpuchi Ụlọ

● Ihe eji eme ihe: Seramiiki alumina dị ọcha nke ukwuu (Al₂O₃)

2. Ọrụ Isi na Ngwaọrụ Semiconductor

N'ime usoro ụlọ AMAT, mgbanaka mkpọchi a na-arụ ọrụ nke njikwa igwe na nkwa nkwụsi ike usoro:

① Ndozi ihe owuwu na njikọta ụlọ

A na-eji ya arụzi ihe ndị dị mkpa dị n'ime ụlọ ahụ nke ọma, gụnyere:

●Quartz (ihe mejupụtara quartz)

●Ngwa mkpuchi ụlọ (n'ime ụlọ)

●Mgbanaka n'akụkụ (usoro mgbanaka n'akụkụ)

●Isi ịsa ahụ (usoro nkesa gas)

Mkpọchi kpọmkwem na-egbochi nhazi nke ihe owuwu nke mgbasa okpomọkụ ma ọ bụ nrụgide ikuku na-akpata.

② Njikwa Nhazi Plasma

Izi ezi nke mgbanaka mkpọchi ahụ na-emetụta ozugbo:

●Symmetry nke nkesa ọkụ eletrik

●Nhazi njupụta plasma

●Ike njikwa mmetụta nke akụkụ

Nke a dị oke mkpa maka usoro dị elu (≤28 nm).

③ Nkwa njikwa na mmejuputa ihe

Nkwụsi ike nke ihe owuwu na-ebelata obere mkpọtụ na esemokwu, si otú a na-ebelata:

●mmepụta obere-ngwụcha

●mmetọ ọnụ wafer

●mgbanwe na njupụta ntụpọ

3. Ụdị Ọdịda A Na-ahụkarị (Nyocha Ọdịda)

Dabere na ahụmịhe Semixlab nwere n'ịrụzi na imeziwanye akụrụngwa, ụdị ọdịda a na-ahụkarị maka ụdị Al₂O₃ Clamp Ring gụnyere:

① Mbuze Plasma

Ikpughere ogologo oge na gburugburu ebe gas mmeghachi omume na-eduga na:

●Ịkpụcha elu

●Ịgbapụta ihe

●Mmụba mwepụta nke ihe ndị dị n'ime ya

② Mgbawa nrụgide okpomọkụ

Mgbanwe okpomọkụ ngwa ngwa kpatara ya (ịgbagharị okpomọkụ):

●Mkpụpụta na mgbasa nke obere mgbawa

●Mbelata ike nhazi

●Ihe ize ndụ nke mgbawa nwere ike ime

③ Nchicha Edge

A na-ahụkarị ya n'ọnọdụ ndị a:

●Nrụgide nrụnye na-adịghị mma

●Njikwa ike na-ezighi ezi

●Mmetụta igwe

④ Mmebi nke ihe na-anaghị ekpochapụ ihe

Mwepụ nke ihe ndị dị n'ime Al₂O₃ mgbe e mebiri elu:

●Ọnụọgụ ntụpọ wafer dị elu

●Window usoro dị warara

⑤ Ndagharị akụkụ

Mgbanwe microstructural nke sitere na ibu okpomọkụ ogologo oge:

●Mbelata izi ezi nke nhazi

●Mkpuchi ụlọ mebiri emebi