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Ihe nrụpụta ngwụcha mbufe wafer
Semixlab Alumina Ceramic Wafer Transfer End Effector na-enye nkwụsi ike n'arụ ọrụ, ịdị ọcha na nguzogide corrosion maka automation semiconductor ọgbara ọhụrụ. Site na ijikọta nhazi alumina dị elu, ịrụ ọrụ nkenke, na imecha elu elu, Semixlab na-akwado akwa wafer zuru ụwa ọnụ iji nweta mkpụrụ dị elu, ọnụego ntụpọ dị ala, yana ogologo oge akụrụngwa. Na-atụ anya ndụmọdụ gị n'oge ọ bụla.
Description
Ⅰ Uru ihe onwunwe na nke anụ ahụ
Emepụtara Semixlab Wafer Transfer End Effector site na seramiiki Alumina (Al₂O₃) dị elu, arụpụtara iji nye nkwụsi ike n'ụzọ pụrụ iche na nke ọkụ na gburugburu nhazi semiconductor dị elu.
Emebere akụkụ a nkenke maka ịdị ọcha dị elu, nkwụsi ike nhazi, yana iguzogide plasma ogologo oge na gas na-emebi emebi — na-eme ka ọ bụrụ nhọrọ kacha mma maka njikwa wafer na CVD, PECVD, etching, oxidation, na akụrụngwa epitaxy.
Uru ihe dị mkpa:
● Ịdị ọcha ≥ 99.5%: Na-eme ka mmetọ ọla ion efu efu, na-ejigide iguzosi ike n'ezi ihe n'elu wafer.
● Ike siri ike (Mohs ~ 9): Nguzogide abrasion pụrụ iche maka kọntaktị wafer ugboro ugboro.
● Thermal Stability ruo 1000 ° C: Ọ dị mma maka ọrụ mbufe wafer na-ekpo ọkụ.
● Mkpuchi ọkụ eletrik dị mma: Mgbochi olu> 10¹⁴ Ω·cm na-egbochi mmebi ESD.
● Ultra-Smooth Surface Finish (Ra ≤ 0.02 μm): Na-ebelata ncha wafer na ọgbọ irighiri.
● Kemịkalụ siri ike na Nguzogide Plasma: Na-egbochi mkpughe plasma HF, Cl₂, CF₄, na O₂.
E jiri ya tụnyere quartz ma ọ bụ ihe ndị ọzọ mejupụtara carbon, ceramik Alumina na-enye nkwụsi ike, ịdị ọcha na ogologo ndụ dị elu n'okpuru ọnọdụ ịgba ọsọ na ikuku ikuku ugboro ugboro.
Ⅱ Ihe ịma aka ndị nkịtị na ngwọta injinia
| ịma aka | Mee | Ngwọta Injinia Semixlab |
| Ọgbọ irighiri ihe | urface siri ike ma ọ bụ obere mgbawa site na njikwa ugboro ugboro | enyo enyo (Ra ≤ 0.02 μm) na chamfering nkenke; ihicha ultrasonic mgbe niile |
| Wafer Slippage | Esemokwu dị n'elu enweghị isi ma ọ bụ nkesa agụụ na-adịghị mma | Jiometry groove kachasị mma yana mkpuchi micro-texture maka njigide wafer na-abawanye |
| Mwulite Charge Static | Mwepu ụgwọ ezughi oke n'okpuru oghere | Iji semiconductive Al₂O₃-TiO₂ mejupụtara iji kwalite ntọhapụ ụgwọ |
| Ọkpụkpụ Plasma ma ọ bụ Mwakpo Kemịkalụ | Ikpughe na-aga n'ihu na gas na-emebi emebi | Iji Al₂O₃ (> 99.8%) nwere mkpuchi SiC ma ọ bụ Y₂O₃ maka nchebe elu. |
| Mmebi nke ọkụ ọkụ | Mgbanwe okpomọkụ ngwa ngwa n'etiti mpaghara usoro | Nhazi alumina nke ọma nwere CTE dị ala na usoro ikpo ọkụ iji belata nrụgide |
ngwa
Ọrụ na Ngwa na Usoro Semiconductor
Semixlab Wafer Nyefee End Effector na-eje ozi dị ka interface dị oke mkpa n'etiti sistemu njikwa roboti yana wafer silicon siri ike, na-ahụta njem ziri ezi, kwụsiri ike na enweghị mmetọ n'etiti ụlọ ọrụ.
Isi ihe ngosi ngwa:
1. Nbudata na nbudata wafer
Ejiri ya na LPCVD, PECVD, na ọkụ oxidation, ndị na-eme ka alumina na-arụ ọrụ na-edozi nhazi wafer ma wepụ micro-vibration n'oge ntinye na mwepụ na ụlọ nhazi.
2. Igwe eji eme ihe eji eme ihe
Ejikọtara n'ime modul mbufe wafer na-akpaghị aka, ndị na-eme ihe ndị a na-enye izi ezi n'ọkwa ọzọ, dị oke mkpa maka ihe nrụpụta dị elu na nke ziri ezi.
3. Ijikwa usoro okpomọkụ dị elu
N'ihi nkwụsi ike nke okpomọkụ ya dị mma, onye na-emepụta alumina na-akwado nnyefe wafer post-deposition mgbe usoro okpomọkụ dị elu dị ka uto epitaxial na annealing.
4. Plasma na Etch Chamber Integration
Na-eguzogide gas na-emeghachi omume na mbuze plasma, ihe alumina na-eme ka arụ ọrụ na-adịgide adịgide na etchers plasma na sistemụ nhicha.
5. Mmetọ-Nchịkwa gburugburu
Elu ya dị ọcha na inertness kemịkalụ na-eme ka ọ dabara adaba maka ọnụ usoro dị oke egwu (<10 nm), ebe ọbụlagodi nje na-emetụta mkpụrụ ngwaọrụ.
asọmpi Advantage
Semixlab Ceramic End Effector Uru
● Nkenkenke: njikwa akụkụ nke ọkwa ISO yana flatness sub-micron maka kọntaktị wafer kwụsiri ike.
● Ịdị ọcha: 100% ihe na-adaba na ime ụlọ dị ọcha na nyocha ikuku gas siri ike na mmetọ.
● Nhazi: A na-enweta ya n'ọtụtụ geometries (ọnụ ọnụ, ụdị oghere, ụdị ndụdụ) iji kwekọọ na sistemụ roboti dị iche iche.
● Ntụkwasị obi: Arụmọrụ oge ndụ egosipụtara na akwa semiconductor fabs zuru ụwa ọnụ.
Ndị injinia Semixlab na-aga n'ihu na-anụcha nhazi seramiiki na teknụzụ mkpuchi iji hụ na nha nha nha, obere mkpụrụ irighiri ihe, yana ogologo ndụ ọrụ nke onye ọ bụla. Anyị na-atụsi anya ike ịnye gị ngwaahịa ọkachamara na ahaziri iche yana ngwọta teknụzụ.
anyị Ọrụ
Ụlọ ahịa ngwaahịa Semixlab
